TY - JOUR T1 - Scaled-up Synthesis of Freestanding Molybdenum Disulfide Membranes for Nanopore Sensing AU - Alibakhshi, Mohammad Amin AU - Kang, Xinqi AU - Clymer, David AU - Zhang, Zhuoyu AU - Vargas, Anthony AU - Meunier, Vincent AU - Wanunu, Meni Y1 - 2022/12/29 PY - 2022 DA - 2022/12/29 N1 - https://doi.org/10.1002/adma.202207089 DO - https://doi.org/10.1002/adma.202207089 T2 - Advanced Materials JF - Advanced Materials JO - Advanced Materials JA - Adv. Mater. SP - 2207089 VL - n/a IS - n/a KW - Nanopores KW - MoS2 KW - scalable KW - membranes PB - John Wiley & Sons, Ltd SN - 0935-9648 M3 - https://doi.org/10.1002/adma.202207089 UR - https://doi.org/10.1002/adma.202207089 Y2 - 2023/01/09 N2 - Abstract Two-dimensional (2D) materials, owing to their extremely low thickness, are ideal materials for nanopores with optimal detection sensitivity and resolution. Among 2D materials, molybdenum disulfide (MoS2) has gained significant traction as a more suitable nanopore material compared to graphene, which is much more hydrophobic. However, performing experiments using 2D nanopores remains challenging due to the lack of scalable fabrication methods of high-quality freestanding membranes. Here we report a site-directed, scaled-up synthesis of MoS2 freestanding membranes on predrilled nanoapertures on 4-inch wafer substrates with 75% yields. A unique chemical vapor deposition (CVD) method that introduces sulfur and molybdenum dioxide vapors across both sides of the sub-100 nm nanoapertures results in the exclusive formation of freestanding membranes that seal the apertures. Nucleation and growth near the nanoaperture edges is followed by nanoaperture decoration with MoS2 which proceeds until a critical flake radius of curvature is achieved, after which fully spanning freestanding membranes form. Intentionally blocking flow of reagents through the apertures inhibits MoS2 nucleation around the nanoapertures, thereby promoting the formation of large-crystal monolayer MoS2 membranes. The in situ grown membranes along with facile membrane wetting and nanopore formation using dielectric breakdown enabled the recording of dsDNA translocation events at 1 MHz bandwidth, unprecedented for 2D nanopores. The methods presented here are important steps towards the development of many applications requiring single-layer membranes built at-scale in high-throughput 2D nanofluidics and nanopores studies. This article is protected by copyright. All rights reserved ER -